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Miniature and MOEMS Flow Sensors (Abstract)
D. Fourguette, D. Modarress, F. Taugwalder, D. Wilson, M Koochesfahard and M. Gharib.
VioSense Corporation
2400 Lincoln Ave., Altadena, California 91001, USA
The full text is available as a downloadable PDF; you will
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Recent progress in the development of a miniature Laser Doppler
Anemometer (LDA) and a micro optical shear stress sensor is described.
Miniaturization of these sensors has been achieved with the use of
integrated optics and micro fabrication techniques. This paper
describes the fabrication of the two sensors and presents an experiment
for the evaluation of the sensors. The results show perfect agreement
between the boundary layer velocity gradient performed with the LDA, and
the measurements obtained with the shear stress sensor. The range of
experimental conditions suitable for the wall shear sensor is reported.
Finally, we describe the application of the sensors in a series of tests
performed at the William B. Morgan Large Cavitation Channel of the
Navy's Carderock Division, in Memphis, Tennessee.
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